Online wafer detector

published_time:2018-04-28      view:35     

The company developed a highly intelligent automated on-line wafer defect inspection instrument that scans and detects defects such as exposure, etching, non-exposure, design, and materials (chips), and has a missed detection rate of <1 for non-critical dimensions of isolated defects. %, Defective pattern discovery analysis capability, defect location accuracy 100 nanometers, defect size, shape measurement analysis function. It can also be used as a post-development (ADI) and post-etch (AEI) residue detection tool, side and back impurity and defect measurement tools. On the basis of the original production line, only a small number of appearances and mechanical modifications can be applied to various sizes of chips (currently 12, 8, and 6 inch, etc.) and various processes.